SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2741-2744

Lithographically induced self-assembly of microstructures with a liquid-filled gap between the mask and polymer surface

(2) Deshpande, Paru a Chou, Stephen Y a

a Princeton University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; FLOW OF FLUIDS; LITHOGRAPHY; MASKS; OILS AND FATS; PHASE INTERFACES; POLYMETHYL METHACRYLATES; SELF ASSEMBLY; SUBSTRATES; SURFACE REACTIONS; THERMAL EFFECTS; VISCOSITY OF LIQUIDS;

LIQUID FILLED GAP; LITHOGRAPHICALLY INDUCED SELF ASSEMBLY; MICROFLUIDIC DEVICES; THIN POLYMER FILM; TRANSITION TEMPERATURE;

THIN FILMS;

EID: 0035519132 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1414015 Document Type: Article

Times cited : (22)

References (16)

1
- 0034157362
- S. C. Jakeway, A. J. de Mello, and E. L. Russell, Fresenius J. Anal. Chem. 366, 525 (2000).
- (2000) Fresenius J. Anal. Chem. , vol.366 , pp. 525
- Jakeway, S.C.¹ De Mello, A.J.² Russell, E.L.³

2
- 0034213023
- G. H. W. Sanders and A. Manz, TrAC, Trends Anal. Chem. 19, 364 (2000).
- (2000) TrAC, Trends Anal. Chem. , vol.19 , pp. 364
- Sanders, G.H.W.¹ Manz, A.²

3
- 0035144377
- D. Figeys and D. Pinto, Electrophoresis 22, 208 (2001).
- (2001) Electrophoresis , vol.22 , pp. 208
- Figeys, D.¹ Pinto, D.²

4
- 0031147386
- M. A. Gretillat, F. Paoletti, P. Thiebaud, S. Roth, M. KoudelkaHep, and N. F. deRooij, Sens. Actuators A 60, 219 (1997).
- (1997) Sens. Actuators A , vol.60 , pp. 219
- Gretillat, M.A.¹ Paoletti, F.² Thiebaud, P.³ Roth, S.⁴ Koudelkahep, M.⁵ DeRooij, N.F.⁶

5
- 0032021451
- M. Stjernstrom and J. Roeraade, J. Micromech. Microeng. 8, 33 (1998).
- (1998) J. Micromech. Microeng. , vol.8 , pp. 33
- Stjernstrom, M.¹ Roeraade, J.²

6
- 0033138321
- C. G. J. Schambmueller, M. Koch, A. G. R. Evans, and A. Brunnschweiler, J. Micromech. Microeng. 9, 176 (1999).
- (1999) J. Micromech. Microeng. , vol.9 , pp. 176
- Schambmueller, C.G.J.¹ Koch, M.² Evans, A.G.R.³ Brunnschweiler, A.⁴

7
- 0032403465
- D. C. Duffy, J. C. McDonald, O. J. A. Schueller, and G. M. Whitesides, Anal. Chem. 70, 4974 (1998).
- (1998) Anal. Chem. , vol.70 , pp. 4974
- Duffy, D.C.¹ McDonald, J.C.² Schueller, O.J.A.³ Whitesides, G.M.⁴

8
- 0034656239
- J. D. Xu, L. Locascio, M. Gaitan, and C. S. Lee, Anal. Chem. 72, 1930 (2000).
- (2000) Anal. Chem. , vol.72 , pp. 1930
- Xu, J.D.¹ Locascio, L.² Gaitan, M.³ Lee, C.S.⁴

9
- 0033268574
- S. Y. Chou and L. Zhuang, J. Vac. Sci. Technol. B 17, 3197 (1999).
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 3197
- Chou, S.Y.¹ Zhuang, L.²

10
- 0001577714
- S. Y. Chou, L. Zhuang, and L. Guo, Appl. Phys. Lett. 75, 1004 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1004
- Chou, S.Y.¹ Zhuang, L.² Guo, L.³

11
- 0008005793
- 2K PMMA available from Sigma-Aldrich
- 2K PMMA available from Sigma-Aldrich.

12
- 0007967144
- Krytox 1514 available from Dupont
- Krytox 1514 available from Dupont.

13
- 0007969994
- Krytox oil data sheet available from Dupont
- Krytox oil data sheet available from Dupont.

14
- 1842695585
- See for example, P. G. de Gennes, Rev. Mod. Phys. 57, 827 (1985).
- (1985) Rev. Mod. Phys. , vol.57 , pp. 827
- De Gennes, P.G.¹

15
- 0003774488
- Wiley, New York
- Polymer Handbook, edited by J. Brandrup, E. H. Immergut, and E. A. Grulke (Wiley, New York, 1999), pp. VI/527.
- (1999) Polymer Handbook
- Brandrup, J.¹ Immergut, E.H.² Grulke, E.A.³

16
- 33847593312
- unpublished
- S. Y. Chou (unpublished).
- Chou, S.Y.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.