Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5448, Issue PART 2, 2004, Pages 737-748

  Tanaka, H ^a   Akinaga, K ^a   Takahashi, A ^a   Okada, T ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

CO2 laser; Extreme ultraviolet; Laser produced plasma; Tin particles; Xenon

Indexed keywords

CRYOGENICS; LASER BEAMS; LASER PRODUCED PLASMAS; LIGHT SOURCES; NEODYMIUM LASERS; OPTIMIZATION; PHOTOLITHOGRAPHY; PLASMAS; SPECTROGRAPHS; TIN; ULTRAVIOLET RADIATION; XENON;

CO2 LASERS; EXTREME ULTRAVIOLET (EUV); TIN-PARTICLES; TRANSMISSION GRATING SPECTROGRAPHS (TGS);

CARBON DIOXIDE LASERS;

EID: 11844271536     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.547372     Document Type: Conference Paper

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