New approaches to atomic force microscope lithography on silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2912-2915

  Birkelund, K ^a   Thomsen, E V ^a   Rasmussen, J P ^a   Hansen, O ^a   Tang, P T ^a   Moller P ^a   Grey, F ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4143086099     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589753     Document Type: Article

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