AFM probes with directly fabricated tips

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 58-62

  Boisen, Anja ^a,b   Hansen, Ole ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b DME Danish Micro Engineering A/S

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; REACTIVE ION ETCHING;

ATOMIC FORCE MICROSCOPY PROBES;

PROBES;

EID: 0030091922     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/012     Document Type: Article

References (6)

1. Boisen A et al 1995 Indirect tip fabrication for scanning probe microscopy Proc. Micro- and Nano- Engineering 1995 Microelectronic Eng. at press
2. Schwarz U D 1994 Tip artefacts in scanning force microscopy J. Microsc. 173 183
3. Albrecht T R et al 1990 Microfabrication of cantilever styli for the atomic force microscope J. Vac. Sci. Technol. A 8 3386
4. Rangelow I W 1995 Sharp silicon tips for AFM and field emission Microelectronic Eng. 23 369
5. Wolter O, Bayer Th and Greschner J 1991 Micromachined silicon sensors for scanning force microscopy J. Vac. Sci. Technol. B 9 1353
6. Marcus R B 1990 Formation of silicon tips with <1 nm radius Appl. Phys. Lett. 56 236