Reversible stress changes at all stages of Volmer-Weber film growth

Journal of Applied Physics

Volumn 95, Issue 3, 2004, Pages 1011-1020

  Friesen, C ^a   Seel, S C ^a,b   Thompson, C V ^a  

^a USA   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COALESCENCE; COPPER; DEPOSITION; GRAIN BOUNDARIES; INTERFACIAL ENERGY; MECHANICAL VARIABLES MEASUREMENT; MOLECULAR DYNAMICS; NUCLEATION; POLYCRYSTALLINE MATERIALS; STRESSES; THERMAL EFFECTS;

INTERACTION ENERGY; POLYCRYSTALLINE COPPER FILMS; REVERSIBLE STRESS CHANGE; VOLMER-WEBER FILM GROWTH;

FILM GROWTH;

EID: 1142292391     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1637728     Document Type: Article

References (31)

1. J. A. Floro, E. Chason, R. C. Cammarata, and D. J. Srolovitz, MRS Bull. 27, 19 (2002).
2. R. Koch, J. Phys. Condens. Matter 6, 9519 (1994).
3. J. A. Floro, S. J. Hearne, J. A. Hunter, P. Kotula, S. C. Seel, and C. V. Thompson, J. Appl. Phys. 89, 4886 (2001).
4. R. Abermann and R. Koch, Thin Solid Films 129, 71 (1985).
5. A. Shull and F. Spaepen, J. Appl. Phys. 80, 6243 (1996).
6. A. Shull, Ph.D. thesis, Harvard University, 1996.
7. R. W. Hoffman, Thin Solid Films 34, 185 (1976).
8. W. D. Nix and B. M. Clements, J. Mater. Res. 14, 3467 (1999).
9. S. C. Seel, C. V. Thompson, S. J. Hearne, and J. A. Floro, J. Appl. Phys. 88, 7079 (2000).
10. L. B. Freund and E. Chason, J. Appl. Phys. 89, 4866 (2001).
11. S. C. Seel and C. V. Thompson, J. Appl. Phys. 93, 9038 (2003).
12. S. C. Seel, Ph.D. thesis, Massachusetts Institute of Technology, 2002.
13. R. Abermann, R. Kramer, and J. Mäser, Thin Solid Films 52, 215 (1978).
14. R. Abermann, R. Koch, and R. Kramer, Thin Solid Films 58, 365 (1979).
15. R. C. Cammarata, T. M. Trimble, and D. J. Srolovitz, J. Mater. Res. 15, 468 (2000).
16. F. Spaepen, Acta Mater. 48, 31 (2000).
17. E. Chason, B. W. Sheldon, L. B. Freund, J. A. Floro, and S. J. Hearne. Phys. Rev. Lett. 88, 156103 (2002).
18. S. C. Seel and C. V. Thompson, JMEMS (submitted for publication).
19. C. Friesen and C. V. Thompson, Unpublished Research.
20. C. Friesen and C. V. Thompson, Phys. Rev. Lett. 89, 126103 (2002).
21. F. Spaepen, Private Communication.
22. M. Henzler, T. Schmidt, and E. Z. Luo, in Structure of Surfaces IV, edited by Xide Xie, S. Y. Tong, and M. A. Hove (World Scientific, Singapore, 1994), p. 619.
23. G. Meyer, J. Wollschlager, and M. Henzler, Surf. Sci. 231, 64 (1990).
24. R. A. Lukaszew and R. Clarke, Appl. Surf. Sci. 191, 118 (2002).
25. C. Friesen and C. V. Thompson, Unpublished Research.
26. L. D. Landau and E. M. Lifshitz, Theory of Elasticity, 2nd ed. (Pergamon Press, Oxford, 1970).
27. V. I. Marchenko and A. Y. Parshin, Sov. Phys. JETP 52, 129 (1981).
28. L. E. Shilkrot and D. J. Srolovitz, Phys. Rev. B 55, 4737 (1997).
29. A. I. Lure, Three-Dimensional Problems of the Theory of Elasticity, edited by J. R. M. Radok (Interscience, New York, 1964).
30. K. H. Lau and W. Kohn, Surf. Sci. 65, 607 (1977).
31. F. Cleri and V. Rosato, Phys. Rev. B 48, 23 (1993).