Numerical study of mixed convection flow in an impinging jet CVD reactor for atmospheric pressure deposition of thin films

Journal of Heat Transfer

Volumn 126, Issue 5, 2004, Pages 764-775

  Vanka, S P ^a   Luo, Gang ^a   Glumac, Nick G ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; BUOYANCY; CHEMICAL VAPOR DEPOSITION; JETS; NATURAL CONVECTION; NOZZLES; THIN FILMS;

BUOYANCY-DRIVEN FLOW; CHEMICAL VAPOR DEPOSITION (CVD) REACTORS; INFLOW GASES; PANCAKE REACTOR;

MIXED CONVECTION;

CONVECTION; HEAT TRANSFER; MATHEMATICAL ANALYSIS; VAPOR DEPOSITION;

EID: 11244290980     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1795232     Document Type: Article

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