Flow visualizations and transient temperature measurements in an axisymmetric impinging jet rapid thermal chemical vapor deposition reactor

Journal of Heat Transfer

Volumn 124, Issue 3, 2002, Pages 564-570

  Mathews, A G ^a   Peterson, J E ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

Experimental; Mixed convection; Temperature; Thin films; Transient

Indexed keywords

CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; HEATING; JETS; LIGHT SCATTERING; REYNOLDS NUMBER; TEMPERATURE MEASUREMENT;

WAFER TEMPERATURE;

FLOW VISUALIZATION;

FLOW STABILITY; FLOW VISUALIZATION; GAS FLOW; JET IMPINGEMENT; REACTOR; TEMPERATURE MEASUREMENT; VAPOR DEPOSITION;

EID: 0036602166     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1469525     Document Type: Article

References (29)

1. A mathematical model of the coupled fluid mechanics and chemical kinetics in a chemical vapor deposition reactor
2. A mathematical model of silicon chemical vapor deposition
3. Flow phenomena in chemical vapor deposition of thin films
4. A numerical model of the flow and heat transfer in a rotating disk chemical vapor deposition reactor
5. A study of traveling wave instabilities in a horizontal channel flow with applications to chemical vapor deposition
6. Thermally unstable convection with applications to chemical vapor deposition channel reactors
7. Buoyancy, soret, dufour and variable property effects in silicon epitaxy
8. Complex flow phenomena in vertical MOCVD reactors: Effects on deposition uniformity and interface abruptness
9. Flow and heat transfer in CVD reactors: Comparison and raman temperatures and finite element model predictions
10. Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy
11. A systematic approach to simulating rapid thermal processing systems
12. The effect of multilayer patterns on temperature uniformity during rapid thermal processing
13. Two and three-dimensional transport models for MOCVD reactors: Effect of boundary conditions
14. Simulation of flow and growth phenomena in a close-spaced reactor
15. Thermo-flow structure and epitaxial uniformity in large-scale metalorganic chemical vapor deposition reactors with rotating susceptor and inlet flow control
16. Flow visualization studies for optimization of OMVPE reactor design
17. Optimization of a stagnation point flow reactor design for metalorganic chemical vapor deposition by flow visualization
18. In situ concentration monitoring in a vertical OMPVE reactor by fiber-optics-based fourier transform infrared spectroscopy
19. Evaluation of infrared thermography as a diagnostic tool in CVD applications
20. Transient temperature measurements in an ideal gas by laser-induced Rayleigh light scattering
21. Rayleigh light scattering measurements of transient gas temperature in a rapid chemical vapor deposition reactor
22. Temperature and density in a hydrogen-air flame from Rayleigh light scattering
23. The application of laser-induced rayleigh light scattering to the study of turbulent mixing
24. Heat transport and temporal evolution of fluid flow near the Rayleigh-Benard instability in cylindrical containers