Detailed modeling of three-dimensional chemical vapor deposition

Journal of Crystal Growth

Volumn 180, Issue 3-4, 1997, Pages 670-679

  Ern, Alexandre ^a,b   Giovangigli, Vincent ^b   Smooke, Mitchell D ^c  

^a UNIVERSITÉ PARIS EST   (France)

^b CENTRE DE MATHÉMATIQUES APPLIQUÉES   (France)

^c Yale University   (United States)

Author keywords

Carbon doping; Chemical vapor deposition; Gallium arsenide; Gas phase chemistry; Multicomponent transport; Surface chemistry

Indexed keywords

ALGORITHMS; CARBON; CHEMICAL REACTORS; DESORPTION; ITERATIVE METHODS; MATHEMATICAL MODELS; NAVIER STOKES EQUATIONS; PHASE INTERFACES; REACTION KINETICS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR GROWTH; THERMAL EFFECTS;

JACOBIAN EVALUATION; NEWTON METHOD;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0031247012     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(97)00311-4     Document Type: Article

References (20)

1. H.K. Moffat, K.F. Jensen, J. Electrochem. Soc. 135 (1988) 459.
2. E.P. Visser, C.R. Kleijn, C.A.M. Govers, C.J. Hoogendoorn, L.J. Giling, J. Crystal Growth 94 (1989) 929.
3. D.I. Fotiadis, M. Bockholt, K.F. Jensen, W. Richter, J. Crystal Growth 100 (1990) 577.
4. J. Ouazzani, F. Rosenberger, J. Crystal Growth 100 (1990) 545.
5. D.I. Fotiadis, S. Kieda, K.F. Jensen, J. Crystal Growth 102 (1990) 441.
6. K.F. Jensen, D.I. Fotiadis, T.J. Mountziaris, J. Crystal Growth 107 (1991) 1.
7. A. Ern, V. Giovangigli, M.D. Smooke, J. Comput. Phys. 126 (1996) 21.
8. M. Tirtowidjojo, R. Pollard, J. Crystal Growth 98 (1989) 420.
9. T.J. Mountziaris, K.F. Jensen, J. Electrochem. Soc. 138 (1991) 2426.
10. M. Masi, H. Simka, K.F. Jensen, T.F. Kuech, R. Potemski, J. Crystal Growth 124 (1992) 483.
11. A. Ern, V. Giovangigli, J. Chem. Vapor Deposition 3 (1995) 3.
12. A. Ern, V. Giovangigli, Multicomponent transport algorithms, Lecture Notes in Physics, New Series Monographs, vol. m 24, Springer, Berlin, 1994.
13. A. Ern, V. Giovangigli, J. Comput. Phys. 120 (1995) 105.
14. D.H. Reep, S.K. Ghandhi J. Electrochem. Soc. 130 (1983) 675.
15. A. Ern, M.D. Smooke, J. Comput. Phys. 105 (1993) 58.
16. R.J. Kee, F.M. Rupley, J.A. Miller, Sandia National Laboratories Report No. SAND89-8009, 1989.
17. V. Giovangigli, N. Darabiha, in: C. Brauner, C. Schmidt-Lainé (Eds.), Mathematical Modeling in Combustion and Related Topics, vol. 140, Nijhoff, Dordrecht, 1988, p. 491.
18. A. Ern, V. Giovangigli, Combust. Sci. Technol. 118 (1996) 387.
19. A. Ern, C.C. Douglas, M.D. Smooke, Int. J. Supercomput. Appl. 9 (1995) 167.
20. T.F. Kuech, E. Veuhoff, J. Crystal Growth 68 (1984) 148.