Optimization of inlet concentration profile for uniform deposition in a cylindrical chemical vapor deposition chamber

International Journal of Heat and Mass Transfer

Volumn 42, Issue 6, 1999, Pages 1141-1146

  Cho, W K ^a   Choi, D H ^a   Kim, M U ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

OPTIMIZATION;

EID: 0344052679     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0017-9310(98)00176-8     Document Type: Article

References (9)

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8. G.N. Vanderplaats, Numerical Optimization Techniques for Engineering Design, McGraw-Hill, 1984, pp. 153-155.
9. M. Peric, A finite volume method for the prediction of three-dimensional fluid flow in complex ducts, PhD thesis, University of London, 1985, pp. 198-207.