On turbulent flows in cold-wall CVD reactors

Journal of Crystal Growth

Volumn 212, Issue 1, 2000, Pages 299-310

  Van Santen, Helmar ^a   Kleijn, Chris R ^a   Van Den Akker, Harry E A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BUOYANCY; CHEMICAL REACTORS; COMPUTER SIMULATION; HEAT FLUX; MATHEMATICAL MODELS; NATURAL CONVECTION; TURBULENT FLOW;

COLD-WALL CHEMICAL VAPOR SIMULATION REACTORS; LARGE EDDY SIMULATION;

CHEMICAL VAPOR DEPOSITION;

EID: 0033745301     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00033-6     Document Type: Article

References (24)

1. Giling L.J. J. Electrochem. Soc. 129(3):1982;634.
2. L.J. Giling, Principles of flow behaviour: applications to CVD-reactors, in: E. Kaldis (Ed.), Crystal Growth of Electronic Materials, North-Holland, Amsterdam, 1985 (Chapter 6).
3. Van Santen H., Kleijn C.R., Van Den Akker H.E.A. Turbulence and its influence on mass transfer in a rotating disk chemical vapor deposition reactor. Allendorf M.D., Bernard C. Chemical Vapor Deposition, Proceedings of the 14th International Conference and EUROCVD11. 1997;214-221 The Electrochemical Society, Pennington, NJ, USA.
4. Van Santen H., Kleijn C.R., Van Den Akker H.E.A. Large eddy simulations in a rotating disk chemical vapor deposition reactor. Kudriavtsev V.V., Cheng W. International Symposium Computational Technologies for Fluid/Thermal/Chemical Systems with Industrial Applications, ASME, PVP, vol. 377-1. 1998;211-216 ASME, New York, NY, USA.
5. Eidson T.M. J. Fluid Mech. 158:1985;245.
6. F.T.M. Nieuwstadt, Direct and large-eddy simulation of free convection, in: G. Hetsroni (Ed.), Proceedings of the Ninth International Heat Transfer Conference, Jerusalem, Israel, Vol. 1, Plenary and Keynote Papers, Hemisphere Publishing Corporation, New York, 1990, pp. 37-47.
7. Leonard A. Adv. Geophys. 18A:1974;237.
8. Smagorinsky J. Mon. Weather Rev. 91:1963;99.
9. J.W. Deardorff, Three-dimensional numerical modelling of the planetary boundary, in: Workshop on Micrometeorology, Amer. Meteor. Soc., Boston, 1973, pp. 271-311.
10. Schmidt H., Schumann U. J. Fluid Mech. 200:1989;511.
11. Wong V.C., Lilly D.K. Phys. Fluids A. 6:1994;1017.
12. P. Sullivan, C.H. Moeng, An evaluation of the dynamic subgrid scale model in buoyancy driven flows, in: Proceedings of the 10th Symposium on Turbulence and Diffusion, Portland, Oregon, 1992, p. 82.
13. J.G.M. Eggels, Direct and large eddy simulation of turbulent flow in a cylindrical pipe geometry, Ph.D. Thesis, Delft University of Technology, 1994.
14. C. Hirsch, Numerical Computation of Internal and External Flows, Vol. 1: Fundamentals of Numerical Discretization, Wiley, Chichester, 1988.
15. U. Schumann, Ein Verfahren zur direkten numerischen Simulation turbulenter Strömungen in Platten- und Ringspaltkanälen und über seinde Anwendung zur Untersuchung von Turbulenzmodellen, Ph.D. Thesis, Technische Hochschule Karlsruhe, Germany, 1973.
16. M.J.B.M. Pourquié, Large-eddy simulation of a free turbulent jet, Ph.D. Thesis, Delft University of Technology, Netherlands, 1994.
17. Van Kan J. SIAM J. Sci. Stat. Comput. 7(3):1986;870.
18. H. Schmidt, R. Friedrich, Numerische simulation turbulenter Grenzschichten (large-eddy-simulation), Teil 1, Technical report, Technische Universität München, Bericht No. 82/2, 1982.
19. H. Schmidt, U. Schumann, H. Volkert, W. Ulrich, Three-dimensional, direct and vectorized elliptic solvers for various boundary conditions, Technical report, DFVLR-Mitt. 84-15, 1984.
20. Asselin R. Mon. Weather Rev. 100:1972;487.
21. R.A.W.M. Henkes, Natural-convection boundary layers, Ph.D. Thesis, Delft University of Technology, 1990.
22. Grötzback G. J. Comp. Phys. 49:1983;241.
23. Goldstein R.J., Chu T.Y. Prog. Heat Transfer. 2:1969;55.
24. Fitzjarreld D.E. J. Fluid Mech. 73:1976;693.