Microstructure analysis of plasma immersion ion implanted diamond-like carbon coatings

Surface and Coatings Technology

Volumn 103-104, Issue , 1998, Pages 395-400

  Hamdi, A H ^a   Qiu, X ^a   Malaczynski, G W ^a   Elmoursi, A A ^a   Simko, S ^a   Militello, M C ^a   Balogh, M P ^a   Wood, B P ^b   Walter, K C ^b   Nastasi, M A ^b  

^a GENERAL MOTORS CORPORATION   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Coatings; Diamond like carbon; Ion implantation; Plasma immersion ion implantation

Indexed keywords

ADHESION; CARBON; CRYSTAL MICROSTRUCTURE; DEPOSITION; DIAMOND FILMS; ION IMPLANTATION; PLASMAS; SURFACE TREATMENT; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

DIAMOND LIKE CARBON COATINGS; PLASMA IMMERSION; SPUTTER CLEANING;

COATINGS;

EID: 0032066545     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00419-8     Document Type: Article

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