DLC coating of a few microns in thickness on three-dimensional substrates

Vacuum

Volumn 73, Issue 3-4, 2004, Pages 541-547

  Oka, Yoshihiro ^a   Nishimura, Yoshimi ^a,b   Yatsuzuka, Mitsuyasu ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b Kurita Seisakusho Co Ltd   (Japan)

Author keywords

Diamond like carbon (DLC); Hybrid process; Plasma CVD; Plasma based ion implantation (PBII); Three dimensional substrate

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; HARDNESS; ION IMPLANTATION; RESIDUAL STRESSES; SUBSTRATES;

HYBRID PROCESS; PLASMA-BASED ION IMPLANTATION (PBII);

DIAMOND LIKE CARBON FILMS;

EID: 1842425390     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.085     Document Type: Conference Paper

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