Formation and analysis of disk-shaped grains by Ni-mediated crystallization of amorphous silicon

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 6, 2004, Pages 2469-2472

  Kim, Kyung Ho ^a   Oh, Jae Hwan ^a   Kim, Eun Hyun ^a   Jang, Jin ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; GRAIN BOUNDARIES; HYDROGENATION; MICROSTRUCTURE; NICKEL; SECONDARY ION MASS SPECTROMETRY; SURFACE PROPERTIES; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

ANGLE MISORIENTATION; AREA DENSITY; SELECTIVE ELECTRON DIFFRACTION (SAD); SOLID PHASE CRYSTALLIZATION;

POLYSILICON;

EID: 10244230936     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1810168     Document Type: Article

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