Electron backscattered diffraction study of poly-Si by Ni-mediated crystallization of amorphous silicon using a SiO2 nanocap

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 650-654

  Chang, Y J ^a,c   Oh, J H ^a   Kim, K H ^a   Jang, Jin ^a   Kimn, D I ^b   Oh, K H ^b  

^a Kyung Hee University   (South Korea)

^b Seoul National University   (South Korea)

^c SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; CRYSTALLIZATION; ELECTRON DIFFRACTION; GRAIN BOUNDARIES; GRAIN GROWTH; GRAIN SIZE AND SHAPE; NANOSTRUCTURED MATERIALS; PLASMAS; POLYCRYSTALLINE MATERIALS; SUBSTRATES;

CRYSTALLINITY LEVELS; ELECTRON BACKSCATTERED DIFFRACTION (EBSD); NANOCAP LAYERS; OXYGEN PLASMAS;

AMORPHOUS SILICON;

EID: 3142583520     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1714886     Document Type: Article

References (17)

1. R. C. Cammarata, C. V. Thomson, C. Hayzelden, and K. N. Tu, J. Mater. Res. 5, 2133 (1990).
2. S. Y. Yoon, K. H. Kim, C. O. Kim, J. Y. Oh, and J. Jang, J. Appl. Phys. 82, 5865 (1997).
3. C. Hayzelden and J. L. Batstone, J. Appl. Phys. 73, 8279 (1993).
4. K. H. Kim, S. J. Park, A. Y. Kim, and J. Jang, J. Non-Cryst. Solids 83, 299 (2002).
5. J. Jang, J. Y. Oh, S. K. Kim, Y. J. Choi, S. Y. Yoon, and C. O. Kim, Nature (London) 385, 481 (1998).
6. S. Jagar, M. Chan, H. Wang, V. M. C. Poon, and A. M. Myansnikov, Solid-State Electron. 45, 743 (2001).
7. S. Y. Yoon, S. J. Park, K. H. Kim, J. Jang, and C. O. Kim, J. Appl. Phys. 87, 609 (2000).
8. J. Jang, S. J. Park, K. H. Kim, B. R. Cho, W. K. Kwak, and S. Y. Yoon, J. Appl. Phys. 88, 3099 (2000).
9. J. H. Choi, D. Y. Kim, B. K. Choo, W. S. Sohn, and J. Jang, Electrochem. Solid-State Lett. 6, G16 (2003).
10. W. S. Shon, J. H. Choi, K. H. Kim, J. H. Oh, S. S. Kim, and J. Jang, J. Appl. Phys. 94, 4326 (2003).
11. K. Nogita and A. K. Dahle, Mater. Charact. 46, 305 (2001).
12. P. J. Grunthaner and F. J. Grunthaner, J. Vac. Sci. Technol. 19, 3 (1981).
13. D. W. Callister, Jr., Materials Science and Engineering an Introduction (Wiley, New York, 1991).
14. M. Moniwa, K. Kusukawa, M. Ohkura, and E. Takeda, Jpn. J. Appl. Phys. 32, 312 (1993).
15. Y. D. Lin, Y. S. Wu, C. W. Chao, and G. R. Hu, Mater. Chem. Phys. 80, 577 (2003).
16. D. A. Porter and K. E. Easterling, Phase Transformations in Metals and Alloys (Chapman & Hall, London, 1992), p. 118
17. V. Randle and O. Engler, Introduction to Texture Analysis (Gordon and Breach, New York, 2000), p. 264.