|
Volumn 93, Issue 11, 2003, Pages 9165-9169
|
Deposition of hard magnetic rare-earth-Fe-B thin films by magnetron sputtering
|
Author keywords
[No Author keywords available]
|
Indexed keywords
BORON;
COERCIVE FORCE;
IRON;
MAGNETRON SPUTTERING;
MICROSTRUCTURE;
RARE EARTHS;
REMANENCE;
SILICON;
RARE EARTH FILMS;
THIN FILMS;
|
EID: 0038003883
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1564863 Document Type: Article |
Times cited : (20)
|
References (16)
|