A micromachined magnetostrictive pressure sensor using magneto-optical interrogation

Sensors and Actuators, A: Physical

Volumn 81, Issue 1-3, 2000, Pages 137-141

  Karl, W J ^a,c   Powell, A L ^a   Watts, R ^a,b,d   Gibbs, M R J ^a,c   Whitehouse, C R ^a,e  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b Department of Obstetrics Gynecology   (United States)

^c Sheffield Centre for Advanced Magnetic Materials and Devices   (United Kingdom)

^d WEILL CORNELL MEDICAL COLLEGE   (United States)

^e Engineering and Physical Sciences Research Council UK   (United Kingdom)

Author keywords

Magnetostriction; Magnetostrictive devices; Microelectromechanical systems; Pressure sensor

Indexed keywords

KERR MAGNETOOPTICAL EFFECT; MAGNETIC ANISOTROPY; MAGNETIC THIN FILM DEVICES; MAGNETOSTRICTION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRESSURE MEASUREMENT;

MAGNETO-OPTICAL INTERROGATION; PRESSURE SENSORS;

MICROSENSORS;

EID: 0033881620     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00154-5     Document Type: Article

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