Growth and patterning of amorphous FeSiBC films

Journal of Magnetism and Magnetic Materials

Volumn 162, Issue 2-3, 1996, Pages 147-154

  Shearwood, C ^a   Mattingley, A D ^a   Gibbs, M R J ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

Amorphous systems Films; FeSiBC; Magnetoelastic; Microfabrication; MOKE; Sputtering

Indexed keywords

AMORPHOUS FILMS; FERROMAGNETIC MATERIALS; FILM GROWTH; KERR MAGNETOOPTICAL EFFECT; MAGNETOMETERS; MICROELECTRONIC PROCESSING; POLYCRYSTALLINE MATERIALS; POLYIMIDES; SEMICONDUCTING FILMS; SPUTTERING;

FILM PATTERNING; HIGH RESOLUTION INDUCTIVE MAGNETOMETER;

MAGNETIC FILMS;

EID: 0030565279     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-8853(96)00257-0     Document Type: Article

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