Performance modelling of micromachined sensor membranes coated with piezomagnetic material

Sensors and Actuators: A. Physical

Volumn 51, Issue 2-3, 1995, Pages 219-224

  Affane, W ^a   Gibbs, M R J ^a   Powell, A L ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

Micromachining; Modelling; Piezomagnetic materials

Indexed keywords

MAGNETIC FIELD EFFECTS; MAGNETIC MATERIALS; MAGNETIC PERMEABILITY; MAGNETOSTRICTION; MEMBRANES; MICROMACHINING;

MICROMACHINED SENSOR MEMBRANES; PIEZOMAGNETIC MATERIALS;

SENSORS;

EID: 0242638716     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(95)01215-X     Document Type: Article

References (12)

1. Capacitive microphone with a surface micromachined backplate using electroplating technology
2. A small-size silicon microphone for measurements in turbulent gas flows
3. Piezomagnetic materials for use in microelectromechanical systems
4. Sensitive, wide frequency range magnetostrictive strain gauge
5. Anisotropy and magnetostriction in metallic glasses
6. Amorphous FeBSi magnetic films by reactive sputtering from a pure iron source
7. Magnetic and magnetoelastic properties of amorphous FeSiBC films
8. Planar inductors on magnetic substrates
9. Stress-magnetic effects in iron-rich amorphous alloys and shock-stress sensors with no power