Development of 1×4 micro optical switch based on SOI vertical micromirror technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4983, Issue , 2003, Pages 109-113

  Wang, Z F ^a   Shan, X C ^a   Wang, Z P ^a   Cao, W Q ^b   Xu, J F ^b   Lim, S P ^b   Noell, W ^c   De Rooij, N ^c  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Deep reactive ion etching (DRIE); Fiber optical switch; Micro optical electro mechanic system (MOEMS); Silicon on insulator (SOI)

Indexed keywords

FIBER OPTICS; MIRRORS; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY;

MICROMIRRORS;

OPTICAL SWITCHES;

EID: 0038058795     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472787     Document Type: Conference Paper

References (6)

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4. Wilfried Noell, Pierre-Andre Clerc, et al, "Applications of SOI-based optical MEMS", IEEE Journal on Selected Toptics in Quantum Electronics 8, pp. 148-154, 2002.
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6. ZF Wang, XC Shan, ZP Wang, et al, "Development of a new 1×4 optical switch", SPIE Proceeding of DTIP of MEMS/MOEMS, Cannes, SPIE 4755, pp. 544-548, 2002