Large displacement microactuators in deep reactive ion etched single crystal silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4559, Issue , 2001, Pages 138-147

  Smith, Gabe ^a,b   Maloney, John ^a   Fan, Lawrence ^b   DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b NAVAL SURFACE WARFARE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROSTATICS; FABRICATION; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SUBSTRATES;

DEEP REACTIVE ION ETCHING (DRIE);

MICROACTUATORS;

EID: 0035763649     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443028     Document Type: Article

References (13)

1. W. Juan, and S. Pang, "High-Aspect-Ratio Si Vertical Micromirror Arrays for Optical Switching," IEEE J. Microelectromechanical Systems, Vol 7, No. 2, pp. 207-213, 1998.
2. J. Jerman et al., "Electrostatic Microactuator and Method For Use Thereof," US Patent # 5,998,906 Dec, 7, 1999.
3. L. Fan, H. Last, R. Wood, B. Dudley, C. Khan Malek, Z. Ling, "SLIGA Based Underwater Weapon Safety and Arming System," Microsystem Technologies, 4, pp. 168-171, 1998.
4. P.A. Clerc, L. Dellmann, F. Gretillat, M.A. Gretillat, P.F. Indermuhle, S. Jeanneret, Ph. Luginbuhl, C. Marxer, T.L. Pretffer, G.A. Racine, S. Roth, U. Staufer, C. Steble, P. Thiebaud and N.F. de Rooij "Advanced Deep Reactive Ion Etching: A Versatile Tool For Microelectromechanical Systems," J. of Micromech. Microeng. Vol 8, pp. 272-278, 1998.
5. C.M. Ho and Y.-C. Tai, "Review: MEMS and its Application for Flow control," J. Fluids Engineering, Vol. 118, pp. 437-447, 1996.
6. R. Legtenberg, A.W. Groeneveld, and M. Elwenspoek. "Comb-drive Actuators For Large Displacements," J. Micromech. Microeng., Vol 6, pp. 320-329, 1996.
7. R. Legtenberg, E. Berenschot, J. Fluitman and M Elwenspoek "Electrostatic Curved Electrode Actuators," IEEE Solid State Sensor and Actuator Workshop, pp. 37-42, 1995.
8. R.A. Brennen, M. Lim, A. Pisano, and A. Chou, "Large Displacement Linear Actuator," IEEE Solid State Sensor and Actuator Workshop, pp. 135-139, 1990.
9. T. Hirano, T. Furuhata, K. Gabriel, H. Fujita, "Design, Fabrication, and Operation of Submicron Gap Comb-Drive Microactuators," IEEE J. Microelectromechanical Systems, Vol. 1, No. 1 pp. 52-59, 1992.
10. W. Ye, S. Mukherjee. and N. MacDonald, "Optimal Shape Design of an Electrostatic Comb Drive in Microelectromechanical Systems," IEEE J. Microelectromechanical Systems, Vol. 7, No. 1, 1998.
11. C. Lee, S. Han and N. MacDonald, "Multiple Depth, Single Crystal Silicon MicroActuators For Large Displacement Fabricated by Deep Reactive Ion Etching," IEEE Solid State Sensor and Actuator Workshop pp. 135-139, 1998.
12. J. Maloney, "Fabrication And Thermal Actuation Of Three-Dimensional Micro Electro Mechanical Systems" Master of Science Thesis, University of Maryland, 2001.
13. J.D. Grade, H. Jerman, T. Kenny, "A Large-Deflection Electrostatic Actuator for Optical Switching Applications," Solid State Sensor and Actuator Workshop pp. 97-100, 2000.