Flow physics in MEMS

Mecanique et Industries

Volumn 2, Issue 4, 2001, Pages 313-341

  Gad el Hak, Mohamed ^a  

^a University of Notre Dame   (United States)

Author keywords

coulements; Flow; Microelectromechanical devices; Syst mes micro lectrom caniques

Indexed keywords

EID: 0347712344     PISSN: 12962139     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1296-2139(01)01112-5     Document Type: Article

References (137)

1. Angell J.B., Terry S.C., Barth P.W. Silicon micromechanical devices. Faraday Transactions I. 68:1983;744-748.
2. Gabriel K.J., Jarvis J., Trimmer W. Small Machines, Large Opportunities: A Report on the Emerging Field of Microdynamics, National Science Foundation. 1988;AT&T Bell Laboratories, Murray Hill, New Jersey.
3. Gabriel K.J., Tabata O., Shimaoka K., Sugiyama S., Fujita H. Surface-normal electrostatic/pneumatic actuator. Proc. IEEE Micro Electro Mechanical Systems '92. 4-7 February 1992;128-131 Travemünde, Germany.
4. O'Connor L. MEMS: Micromechanical systems. Mechanical Engineering. 114:February 1992;40-47.
5. Gravesen P., Branebjerg J., Jensen O.S. Microfluidics - A review. J. Micromech. Microeng. 3:1993;168-182.
6. Bryzek J., Peterson K., McCulley W. Micromachines on the march. IEEE Spectrum. 31:May 1994;20-31.
7. Gabriel K.J. Engineering microscopic machines. Scientific American. 260:September 1995;150-153.
8. Ashley S. Getting a microgrip in the operating room. Mechanical Engineerin. 118:September 1996;91-93.
9. Ho C.-M., Tai Y.-C. Review: MEMS and its applications for flow control. J. Fluids Engrg. 118:1996;437-447.
10. Ho C.-M., Tai Y.-C. Micro-electro-mechanical systems (MEMS) and fluid flows. Annu. Rev. Fluid Mech. 30:1998;579-612.
11. Hogan H. Invasion of the micromachines. New Scientist. 29:June 1996;28-33.
12. Ouellette J. MEMS: Mega promise for micro devices. Mechanical Engineering. 118:October 1996;64-68.
13. Paula G. MEMS sensors branch out. Aerospace America. 34:September 1996;26-32.
14. Robinson E.Y., Helvajian H., Jansen S.W. Small and smaller: The world of MNT. Aerospace America. 34:September 1996;26-32.
15. Robinson E.Y., Helvajian H., Jansen S.W. Big Benefits from Tiny Technologies. Aerospace America. 34:October 1996;38-43.
16. Madou M. Fundamentals of Microfabrication. 1997;CRC Press, Boca Raton, FL.
17. Tien N.C. Silicon micromachined thermal sensors and actuators. Microscale Thermophys. Engrg. 1:1997;275-292.
18. Amato I. Formenting a revolution, in miniature. Science. 282:(5388):16 October 1998;402-405.
19. Busch-Vishniac I.J. Trends in electromechanical transduction. Physics Today. 51:July 1998;28-34.
20. Kovacs G.T.A. Micromachined Transducers Sourcebook. 1998;McGraw-Hill, New York.
21. Knight J. Dust Mite's dilemma. New Scientist. 162:(2180):29 May 1999;40-43.
22. Epstein A.H. The inevitability of small. Aerospace America. 38:March 2000;30-37.
23. O'Connor L., Hutchinson H. Skyscrapers in a microworld. Mechanical Engineering. 122:March 2000;64-67.
24. Goldin D.S., Venneri S.L., Noor A.K. The great out of the small. Mechanical Engineering. 122:November 2000;70-79.
25. Chalmers P. Relay races. Mechanical Engineering. 123:January 2001;66-68.
26. Lipkin R. Micro steam engine makes forceful debut. Science News. 144:September 1993;197.
27. Garcia E.J., Sniegowski J.J. The design and modelling of a comb-drive-based microengine for mechanism drive applications. Proc. 7th International Conference on Solid-State Sensors and Actuators (Transducers'93), Yokohama, Japan. 7-10 June 1993;763-766.
28. Garcia E.J., Sniegowski J.J. Surface micromachined microengine. Sensors & Actuators A. 48:1995;203-214.
29. Sniegowski J.J., Garcia E.J. Surface micromachined gear trains driven by an on-chip electrostatic microengine. IEEE Electron Device Letters. 17:July 1996;366.
30. Epstein A.H., Senturia S.D. Macro power from micro machinery. Science. 276:23 May 1997;1211.
31. Epstein A.H., Senturia S.D., Al-Midani O., Anathasuresh G., Ayon A., Breuer K., Chen K.-S., Ehrich F.F., Esteve E., Frechette L., Gauba G., Ghodssi R., Groshenry C., Jacobson S.A., Kerrebrock J.L., Lang J.H., Lin C.-C., London A., Lopata J., Mehra A., Mur Miranda J.O., Nagle S., Orr D.J., Piekos E., Schmidt M.A., Shirley G., Spearing S.M., Tan C.S., Tzeng Y.-S., Waitz I.A., Micro-heat engines, gas turbines, and rocket engines - The MIT Microengine Project, AIAA, Paper No. 97-1773, AIAA, Reston, VA, 1997.
32. Madou M. Fundamentals of Microfabrication. 1997;CRC Press, Boca Raton, FL.
33. Kovacs G.T.A. Micromachined Transducers Sourcebook. 1998;McGraw-Hill, New York.
34. Gad-el-Hak M. The MEMS Handbook. 2001;CRC Press, Boca Raton, FL.
35. Roco M.C. A frontier for engineering. Mechanical Engineering. 123:January 2001;52-55.
36. Gilbert H.D. Miniaturization. 1961;Reinhold Publishing, New York.
37. Gad-el-Hak M. The fluid mechanics of microdevices - the Freeman scholar lecture. J. Fluids Engrg. 121:1999;5-33.
38. Gad-el-Hak M. Flow Control: Passive, Active and Reactive Flow Management. 2000;Cambridge University Press, London.
39. Löfdahl L., Gad-el-Hak M. MEMS applications in turbulence and flow control. Prog. Aero. Sciences. 35:1999;101-203.
40. Gad-el-Hak M. Questions in fluid mechanics: Stokes' hypothesis for a newtonian, isotropic fluid. J. Fluids Engrg. 117:1995;3-5.
41. Panton R.L. Incompressible Flow. 2nd edn :1996;Wiley-Interscience, New York.
42. Prud'homme R.K., Chapman T.W., Bowen J.R. Laminar compressible flow in a tube. Appl. Scientific Res. 43:1986;67-74.
43. Pfahler J., Harley J., Bau H., Zemel J.N. Gas and liquid flow in small channels. Cho D., et al. Symp. on Micromechanical Sensors, Actuators, and Systems. ASME DSC. 32:1991;49-60 ASME, New York.
44. Van den Berg H.R., Seldam C.A., Gulik P.S. Compressible laminar flow in a capillary. J. Fluid Mech. 246:1993;1-20.
45. Liu J., Tai Y.C., Lee J., Pong K.C., Zohar Y., Ho C.M. In-situ monitoring and universal modeling of sacrificial PSG etching using hydrofluoric acid. Proc. IEEE Micro Electro Mechanical Systems '93. 1993;71-76 IEEE, New York.
46. Liu J., Tai Y.C., Pong K., Ho C.M. MEMS for pressure distribution studies of gaseous flows in microchannels. Proc. IEEE Micro Electro Mechanical Systems '95. 1995;209-215 IEEE, New York.
47. Pong K.-C., Ho C.-M., Liu J., Tai Y.-C. Non-linear pressure distribution in uniform microchannels. Bandyopadhyay P.R., Breuer K.S., Belchinger C.J. Application of Microfabrication to Fluid Mechanics. ASME FED. 197:1994;47-52 ASME, New York.
48. Harley J.C., Huang Y., Bau H.H., Zemel J.N. Gas flow in micro-channels. J. Fluid Mech. 284:1995;257-274.
49. Piekos E.S., Breuer K.S. Numerical modeling of micromechanical devices using the direct simulation Monte Carlo method. J. Fluids Engrg. 118:1996;464-469.
50. Arkilic E.B., Measurement of the mass flow and tangential momentum accommodation coefficient in silicon micromachined channels, Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge, MA, 1997.
51. Arkilic E.B., Schmidt M.A., Breuer K.S. Slip flow in microchannels. Harvey J., Lord G. Rarefied Gas Dynamics. 19:1995;Oxford University Press, Oxford, UK.
52. Arkilic E.B., Schmidt M.A., Breuer K.S. Gaseous slip flow in long microchannels. J. MEMS. 6:1997;167-178.
53. Arkilic E.B., Schmidt M.A., Breuer K.S. TMAC measurement in silicon micromachined channels. Shen C. Rarefied Gas Dynamics. 20:1997;Beijing University Press, Beijing, China. 6 p.
54. Lighthill M.J. Introduction. Real and ideal fluids. Rosenhead L. Laminar Boundary Layers. 1963;1-45 Clarendon Press, Oxford, UK.
55. Maxwell J.C. On stresses in rarefied gases arising from inequalities of temperature. Phil. Trans. Roy. Soc. Part 1. 170:1879;231-256.
56. Thomas L.B., Lord R.G. Comparative measurements of tangential momentum and thermal accommodations on polished and on roughened steel spheres. Karamcheti K. Rarefied Gas Dynamics. 8:1974;Academic Press, New York.
57. Seidl M., Steinheil E. Measurement of momentum accommodation coefficients on surfaces characterized by Auger spectroscopy, SIMS and LEED. Becker M., Fiebig M. Rarefied Gas Dynamics. 9:1974;E9.1-E9.2 DFVLR-Press, Porz-Wahn, Germany.
58. Porodnov B.T., Suetin P.E., Borisov S.F., Akinshin V.D. Experimental investigation of rarefied gas flow in different channels. J. Fluid Mech. 64:1974;417-437.
59. Von Smoluchowski M. Ueber Wärmeleitung in verdünnten Gasen. Annalen der Physik und Chemie. 64:1898;101-130.
60. Vargo S.E., Muntz E.P., A simple micromechanical compressor and vacuum pump for flow control and other distributed applications, AIAA, Paper No. 96-0310, AIAA, Washington, DC, 1996.
61. Loeb L.B. The Kinetic Theory of Gases. 3rd edn :1961;Dover, New York.
62. Beskok A., Simulation of heat and momentum transfer in complex micro-geometries, M.Sc. Thesis, Princeton University, Princeton, NJ, 1994.
63. Beskok A., Simulations and models of gas flows in microgeometries, Ph.D. Thesis, Princeton University Princeton, NJ, 1996.
64. Beskok A., Karniadakis G.E. Simulation of heat and momentum transfer in complex micro-geometries. J. Thermophys. Heat Transfer. 8:1994;355-370.
65. Beskok A., Karniadakis G.E. A model for flows in channels, pipes and ducts at micro and nano scales. Microscale Thermophys. Engrg. 3:1999;43-77.
66. Knudsen M. Die Gesetze der Molekularströmung und der inneren Reibungsströmung der Gase durch Röhren. Annalen der Physik. 28:1909;75-130.
67. Tison S.A. Experimental data and theoretical modeling of gas flows through metal capillary leaks. Vacuum. 44:1993;1171-1175.
68. Shih J.C., Ho C.-M., Liu J., Tai Y.-C. Non-linear pressure distribution in uniform microchannels. AMD-MD. 238:1995;ASME, New York.
69. Shih J.C., Ho C.-M., Liu J., Tai Y.-C. Monatomic and polyatomic gas flow through uniform microchannels. Breuer K., Bandyopadhyay P., Gad-el-Hak M. Applications of Microfabrication to Fluid Mechanics. ASME DSC. 59:1996;197-203 New York.
70. Beskok A., Karniadakis G.E., Trimmer W. Rarefaction and compressibility effects in gas microflows. J. Fluids Engrg. 118:1996;448-456.
71. Alder B.J., Wainwright T.E. Studies in molecular dynamics. J. Chem. Phys. 27:1957;1208-1209.
72. Alder B.J., Wainwright T.E. Molecular dynamics by electronic computers. Prigogine I. Transport Processes in Statistical Mechanics. 1958;97-131 Interscience, New York.
73. Alder B.J., Wainwright T.E. Decay of the velocity auto-correlation function. Phys. Rev. A. 1:1970;18-21.
74. Ciccotti G., Hoover W.G. Molecular Dynamics Simulation of Statistical Mechanics Systems. 1986;North-Holland, Amsterdam, The Netherlands.
75. Allen M.P., Tildesley D.J. Computer Simulation of Liquids. 1987;Clarendon Press, Oxford, UK.
76. Haile J.M. Molecular Dynamics Simulation: Elementary Methods. 1993;Wiley, New York.
77. Koplik J., Banavar J.R. Continuum deductions from molecular hydroynamics. Annu. Rev. Fluid Mech. 27:1995;257-292.
78. Kennard E.H. Kinetic Theory of Gases. 1938;McGraw-Hill, New York.
79. Hirschfelder J.O., Curtiss C.F., Bird R.B. Molecular Theory of Gases and Liquids. 1954;Wiley, New York.
80. Schaaf S.A., Chambré P.L. Flow of Rarefied Gases. 1961;Princeton University Press, Princeton, NJ.
81. Vincenti W.G., Kruger C.H. Jr. Introduction to Physical Gas Dynamics. 1965;Wiley, New York.
82. Kogan M.N. Trilling L. Rarefied Gas Dynamics. 1969;Nauka, Moscow. Translated from Russian, Plenum, New York.
83. Chapman S., Cowling T.G. The Mathematical Theory of Non-Uniform Gases. 3rd edn :1970;Cambridge University Press, Cambridge, UK.
84. Cercignani C. The Boltzmann Equation and Its Applications. 1988;Springer-Verlag, Berlin.
85. Cercignani C. Rarefied Gas Dynamics: From Basic Concepts to Actual Calculations. 2000;Cambridge University Press, London, UK.
86. Bird G.A. Molecular Gas Dynamics and the Direct Simulation of Gas Flows. 1994;Clarendon Press, Oxford, UK.
87. Kogan M.N. Molecular gas dynamics. Annu. Rev. Fluid Mech. 5:1973;383-404.
88. Muntz E.P. Rarefied gas dynamics. Annu. Rev. Fluid Mech. 21:1989;387-417.
89. Oran E.S., Oh C.K., Cybyk B.Z. Direct simulation Monte Carlo: Recent advances and applications. Annu. Rev. Fluid Mech. 30:1998;403-441.
90. Bhatnagar P.L., Gross E.P., Krook M. A model for collision processes in gases. I. Small amplitude processes in charged and neutral one-component systems. Phys. Rev. 94:1954;511-524.
91. Agarwal R., Yun K., Balakrishnan R., Beyond Navier-Stokes: Burnett equations for flow simulations in continuum-transition regime, AIAA Paper No. 99-3580, Reston, VA, 1999.
92. Bird G.A. Approach to translational equilibrium in a rigid sphere gas. Phys. Fluids. 6:1963;1518-1519.
93. Bird G.A. The velocity distribution function within a shock wave. J. Fluid Mech. 30:1965;479-487.
94. Bird G.A. Molecular Gas Dynamics. 1976;Clarendon Press, Oxford, UK.
95. Bird G.A. Monte Carlo simulation of gas flows. Annu. Rev. Fluid Mech. 10:1978;11-31.
96. Cheng H.K. Perspectives on hypersonic viscous flow research. Annu. Rev. Fluid Mech. 25:1993;455-484.
97. Cheng H.K., Emmanuel G. Perspectives on hypersonic nonequilibrium flow. AIAA J. 33:1995;385-400.
98. Nadolink R.H., Haigh W.W. Bibliography on skin friction reduction with polymers and other boundary-layer additives. Appl. Mech. Rev. 48:1995;351-459.
99. Loose W., Hess S. Rheology of dense fluids via nonequilibrium molecular hydrodynamics: Shear thinning and ordering transition. Rheologica Acta. 28:1989;91-101.
100. Dussan E.B., Davis S.H. On the motion of fluid-fluid interface along a solid surface. J. Fluid Mech. 65:1989;71-95.
101. Dussan E.B. The moving contact line: the slip boundary condition. J. Fluid Mech. 77:1976;665-684.
102. Dussan E.B. On the spreading of liquids on solid surfaces: Static and dynamic contact lines. Annu. Rev. Fluid Mech. 11:1979;371-400.
103. Thompson P.A., Robbins M.O. Simulations of contact line motion: Slip and the dynamic contact line. Nature. 389:25 September 1989;360-362.
104. Moffatt H.K. Viscous and resistive eddies near a sharp corner. J. Fluid Mech. 18:1964;1-18.
105. Pearson J.R.A., Petrie C.J.S. On melt flow instability of extruded polymers. Wetton R.E., Whorlow R.W. Polymer Systems: Deformation and Flow. 1968;163-187 Macmillan, London, UK.
106. Richardson S. On the no-slip boundary condition. J. Fluid Mech. 59:1973;707-719.
107. Den L.M. Issues in viscoelastic fluid mechanics. Annu. Rev. Fluid Mech. 22:1990;13-34.
108. Pfahler J., Harley J., Bau H., Zemel J.N. Liquid transport in micron and submicron channels. Sensors Actuators A. 21-23:1990;431-434.
109. Pfahler J., Liquid transport in micron and submicron size channels, Ph.D. Thesis, University of Pennsylvania, Philadelphia, PA, 1992.
110. Bau H.H. Transport processes associated with micro-devices. Thermal Sci. Engrg. 2:1994;172-178.
111. Israelachvili J.N. Measurement of the viscosity of liquids in very thin films. J. Colloid Interface Sci. 110:1986;263-271.
112. Gee M.L., McGuiggan P.M., Israelachvili J.N., Homola A.M. Liquid to solidlike transitions of molecularly thin films under shear. J. Chem. Phys. 93:1990;1895-1906.
113. Chan D.Y.C., Horn R.G. Drainage of thin liquid films. J. Chem. Phys. 83:1985;5311-5324.
114. Migun N.P., Prokhorenko P.P. Measurement of the viscosity of polar liquids in microcapillaries. Colloid J. of the USSR. 49:1987;894-897.
115. Debye P., Cleland R.L. Flow of liquid hydrocarbons in porous vycor. J. Appl. Phys. 30:1959;843-849.
116. Anderson J.L., Quinn J.A. Ionic mobility in microcapillaries. J. Chem. Phys. 27:1972;1208-1209.
117. Tuckermann D.B., Pease R.F.W. High-performance heat sinking for VLSI. IEEE Electron Device Lett. 2:(5):May 1981.
118. Tuckermann D.B., Pease R.F.W. Optimized convective cooling using micromachined structures. J. Electrochem. Soc. 129:(3):March 1982;C98.
119. Tuckermann D.B., Heat transfer microstructures for integrated circuits, Ph.D. Thesis, Stanford University, Stanford, CA, 1984.
120. Guvenc M.G. V-Groove Capillary for Low Flow Control and Measurement. Fung C.D., Cheung P.W., Ko W.H., Fleming D.G. Micromachining and Micropackaging of Transducers. 1985;215-223 Elsevier, Amsterdam, The Netherlands.
121. Nakagawa S., Shoji S., Esashi M. A micro-chemical analyzing system integrated on silicon chip. Proc. IEEE: Micro Electro Mechanical Systems, Napa Valley, California, IEEE 90CH2832-4. 1990;IEEE, New York.
122. Sharp K.V., Experimental investigation of liquid and particle-laden flows in microtubes, Ph.D. Thesis, University of Illinois at Urbana-Champaign, IL, 2001.
123. Sharp K.V., Adrian R.J., Santiago J.G., Molho J.I. Liquid flow in microchannels. Gad-el-Hak M. The Handbook of MEMS. 2001;CRC Press, Boca Raton, FL.
124. Thompson P.A., Troian S.M. A general boundary condition for liquid flow at solid surfaces. Phys. Rev. Lett. 63:1997;766-769.
125. Atwood B.T., Schowalter W.R. Measurements of slip at the wall during flow of high-density polyethylene through a rectangular conduit. Rheologica Acta. 28:1989;134-146.
126. Went F.W. The size of man. American Scientist. 56:1968;400-413.
127. Mastrangelo C., Hsu C.H. A simple experimental technique for the measurement of the work of adhesion of microstructures. Technical Digest IEEE Solid-State Sensors and Actuators Workshop. 1992;208-212 IEEE, New York.
128. Tang W.C., Nguyen T.-C., Howe R.T. Laterally driven polysilicon resonant microstructures. Sensors Actuators. 20:1989;25-32.
129. Fan L.-S., Tai Y.-C., Muller R.S. Integrated movable micromechanical structures for sensors and actuators. IEEE Transactions on Electronic Devices. 35:1988;724-730.
130. Fan L.-S., Tai Y.-C., Muller R.S. IC-processed electrostatic micromotors. Sensors Actuators. 20:1989;41-47.
131. Tai Y.-C., Muller R.S. IC-processed electrostatic synchronous micromotors. Sensors Actuators. 20:1989;49-55.
132. Brunauer S. Physical Adsorption of Gases and Vapours. 1944;Oxford University Press, Oxford, UK.
133. Majumdar A., Mezic I. Stability regimes of thin liquid films. Microscale Thermophys. Engrg. 2:1998;203-213.
134. Majumdar A., Mezic I. Instability of ultra-thin water films and the mechanism of droplet formation on hydrophilic surfaces. Proc. ASME-JSME Thermal Engineering and Solar Energy Joint Conference, San Diego, CA. 15-19 March 1999;. Also to appear in J. Heat Tran.
135. Israelachvili J.N. Intermolecular and Surface Forces. 2nd edn :1991;Academic Press, New York.
136. Swift J., Gulliver's Travels, 1726; reprinting of Lemuel Gulliver's Travels into Several Remote Nations of the World, Hayward & Moore, London, UK, 1840.
137. Swift J., Gulliver's Travels, 1726; reprinting of Lemuel Gulliver's Travels into Several Remote Nations of the World, Hayward & Moore, London, UK, 1840.