Silicon micromachined thermal sensors and actuators

Microscale Thermophysical Engineering

Volumn 1, Issue 4, 1997, Pages 275-292

  Tien, Norman C ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031319110     PISSN: 10893954     EISSN: 10893954     Source Type: Journal    
DOI: 10.1080/108939597200142     Document Type: Article

References (37)

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