Mems and its applications for flow control

Journal of Fluids Engineering, Transactions of the ASME

Volumn 118, Issue 3, 1996, Pages 437-447

  Ho, Chih Ming ^a   Tai, Yu Chong ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FLOW CONTROL; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; SENSORS; TRANSDUCERS;

ACTUATION; MICRO ELECTRO MECHANICAL SYSTEMS; MICRON;

MICROELECTROMECHANICAL DEVICES;

EID: 0030247167     PISSN: 00982202     EISSN: 1528901X     Source Type: Journal    
DOI: 10.1115/1.2817778     Document Type: Article

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