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Volumn 83, Issue 24, 2003, Pages 5014-5016
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Stochastic modeling of progressive breakdown in ultrathin SiO2 films
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
CURRENT VOLTAGE CHARACTERISTICS;
DIFFERENTIAL EQUATIONS;
LEAKAGE CURRENTS;
MATHEMATICAL MODELS;
MOS CAPACITORS;
RANDOM PROCESSES;
SEMICONDUCTOR DEVICE STRUCTURES;
SILICA;
BREAKDOWN DYNAMICS;
PROGRESSIVE BREAKDOWN;
STOCHASTIC DIFFERENTIAL EQUATION;
ULTRATHIN FILMS;
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EID: 0346503157
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1634372 Document Type: Article |
Times cited : (5)
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References (15)
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