Characteristics of point-heating excitation in silicon micro-mechanical resonators

Sensors and Actuators, A: Physical

Volumn 77, Issue 3, 1999, Pages 187-190

  Yu, Hao ^a,b   Wang, Yuelin ^a,b   Ding, Chun ^a,b   Wang, Yaqiang ^a,b   Xu, Yigang ^a,b  

^a ZHEJIANG UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NUMERICAL ANALYSIS; RESONATORS; SILICON;

EXCITED POSITION; MICROMECHANICAL RESONATOR; OPTICAL THERMAL EXCITATION; POINT HEATING EXCITATION; RESONANT AMPLITUDE; SILICON CANTILEVER; VIBRATION MODE;

SILICON SENSORS;

EID: 0033322578     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00064-3     Document Type: Article

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