Fabrication of nanostructures using scanning probe microscope lithography

Materials Science and Engineering C

Volumn 24, Issue 1-2, 2004, Pages 3-9

  Lee, Seunghyun ^a   Kim, Jungoh ^a   Shin, Wan Sub ^a   Lee, Ha Jin ^a   Koo, Sunyoung ^a   Lee, Haiwon ^a  

^a Hanyang University   (South Korea)

Author keywords

Atomic force microscopy (AFM); Carbon nanotubes (CNTs); Langmuir Blodgett (LB) film; Nanolithography; Self assembled monolayers (SAMs)

Indexed keywords

ATOMIC FORCE MICROSCOPY; FABRICATION; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY;

WRITING SPEED;

MATERIALS SCIENCE;

ATOMIC FORCE MICROSCOPY;

EID: 0346216080     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2003.09.001     Document Type: Article

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