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Diamond and Related Materials

Volumn 12, Issue 10-11, 2003, Pages 2032-2036

A comparative study between pure and Al-containing amorphous carbon films prepared by FCVA technique together with high substrate pulse biasing

(5) Sheeja, D a Tay, B K a Sze, J Y a Yu, L J a Lau, S P a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Filtered cathodic vacuum arc (FCVA) technique; Pulse frequency; Pulsed biasing; Pure and Al containing amorphous carbon (a C and a C:Al) films

Indexed keywords

ALUMINUM; HARDNESS; STRESS ANALYSIS; THIN FILMS; WEAR RESISTANCE;

CATHODIC VACUUM ARC TECHNIQUE;

CARBON;

CARBON;

EID: 0346119968 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(03)00198-5 Document Type: Article

Times cited : (32)

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