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Volumn 12, Issue 10-11, 2003, Pages 2032-2036
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A comparative study between pure and Al-containing amorphous carbon films prepared by FCVA technique together with high substrate pulse biasing
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Author keywords
Filtered cathodic vacuum arc (FCVA) technique; Pulse frequency; Pulsed biasing; Pure and Al containing amorphous carbon (a C and a C:Al) films
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Indexed keywords
ALUMINUM;
HARDNESS;
STRESS ANALYSIS;
THIN FILMS;
WEAR RESISTANCE;
CATHODIC VACUUM ARC TECHNIQUE;
CARBON;
CARBON;
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EID: 0346119968
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(03)00198-5 Document Type: Article |
Times cited : (32)
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References (24)
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