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Volumn 12, Issue 10-11, 2003, Pages 2032-2036

A comparative study between pure and Al-containing amorphous carbon films prepared by FCVA technique together with high substrate pulse biasing

Author keywords

Filtered cathodic vacuum arc (FCVA) technique; Pulse frequency; Pulsed biasing; Pure and Al containing amorphous carbon (a C and a C:Al) films

Indexed keywords

ALUMINUM; HARDNESS; STRESS ANALYSIS; THIN FILMS; WEAR RESISTANCE;

EID: 0346119968     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00198-5     Document Type: Article
Times cited : (32)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.