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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 216-220

Internal stress reduction in diamond like carbon thin films by ion irradiation

(4) Lee, D H a Fayeulle, S a Walter, K C a Nastasi, M a

a LOS ALAMOS NATIONAL LABORATORY (United States)

Author keywords

Diamondlike carbon; Ion irradiation; Plasma processing; Stress

Indexed keywords

CHEMICAL BONDS; COMPRESSIVE STRESS; ION BOMBARDMENT; MATHEMATICAL MODELS; PLASMA COLLISION PROCESSES; RADIATION DAMAGE; RESIDUAL STRESSES; STRESS ANALYSIS; THIN FILMS;

AVRAMI-JOHNSON-MEHL ANALYSIS;

DIAMOND FILMS;

EID: 0033513906 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(98)00739-3 Document Type: Article

Times cited : (31)

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