Spectroscopic ellipsometry of TiO2/Si

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5122, Issue , 2002, Pages 50-55

  Babonas, Gintautas J ^a   Niilisk, Ahti ^b   Reza, Alfonsas ^a   Matulis, Algirdas ^a   Rosental, Arnold ^b  

^a CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

^b UNIVERSITY OF TARTU   (Estonia)

Author keywords

Ellipsometry; Multilayer structure; Optical properties; Titanium dioxide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; OPTICAL VARIABLES MEASUREMENT; PHOTOMETRY; SILICON; SPECTROSCOPIC ANALYSIS; TITANIUM DIOXIDE;

POLYMORPHOUS MODIFICATIONS;

OPTICAL FILMS;

EID: 0345375528     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.515700     Document Type: Conference Paper

References (30)

1. 2 coatings for silicon solar cells by pulsed laser deposition," Appl. Phys. A 69 [Suppl.], pp. S409-S411, 1999.
2. M. Gratzel, "Nanocrystalline electronic junctions," in Semiconductor Nanoclusters-Physical, Chemical and Catalytic Aspects, P.V. Kamat and D. Meisel, eds., pp. 353-461, Elsevier, 1997.
3. L.G. Berry, B. Mason, and R.V Dietrich, Mineralogy, W.H. Freeman and Company, San Francisco, 1983.
4. 2 films on structural and optical properties," Appl. Phys. A 73, pp. 595-600, 2001.
5. J.M. Bennett, E. Pelletier, G. Albrand, J.P. Borgogno, B.Lazarides, C.K. Carniglia, R.A. Schmell, T.H. Allen, T. Tuttle-Hart, K.H. Guenther, and A. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl Opt. 28, pp. 3303-3317, 1989.
6. S.Y. Kim, "Simultaneous determination of refractive index, extinction coefficient, and void distribution of titanium dioxide thin film by optical methods," Appl. Opt. 35, pp. 6703-6707, 1996.
7. 2 thin films: Effects of substrate and annealing temperature," J. Appl. Phys. 88, pp. 4634-4641, 2000.
8. G. Parjadis de Lariviere, J.M. Frigrio, J. Rivory, and F. Abeles, "Estimate of the degree of inhomogeneity of the refractive index of dielectric films from spectroscopic ellipsometry," Appl. Opt. 31, pp. 6056-6061, 1992.
9. 2 thin films by spectroscopic ellipsometry and transmission spectroscopy," Appl. Opt. 37, pp. 691-697, 1998.
10. M. Cardona and G. Harbeke, "Optical properties and band structure of wurzite-type crystals and rutile," Phys. Rev. 137, pp. A1467-A1476, 1965.
11. 2 single crystals: I. Optical spectra," J. Phys. C 10, pp. 3893-3915, 1977.
12. 2 single crystals: II assignement to electronic energy levels," J. Phys. C 10, pp. 3917-3939, 1977.
13. 2," Phys. Rev. 18, pp. 5606-5614, 1978.
14. A.L. Companion and R.E. Wyatt, "The diffuse reflectance spectra of some titanium oxides," J. Phys. Chem. Sol. 24, pp. 1025-1028, 1963.
15. 2 single crystals heat-treated under oxygen atmosphere," J. Phys. Chem. Sol. 61, pp. 1237-1242, 2000.
16. 2 films prepared by reactive evaporation," Thin Solid Films 371, pp. 218-224, 2000.
17. 2 thin films based on variable-angle spectroscopic ellipsometry measurements," Mater. Res. Engn. B 68, pp. 42-47, 1999.
18. R. Dannenberg and P.Greene, "Reactive sputter deposition of titanium dioxide," Thin Solid Films 360, pp. 122-127, 2000.
19. 2-II thin films in atomic layer deposition process," J. Cryst. Growth 181, pp. 259-264, 1997.
20. 2 with a chloride pretreatment of substrates," J. Phys. IV France 11, pp. Pr11-103-Pr11-107, 2001.
21. 2 layers prepared by ion-assisted electron-beam evaporation," Thin Solid Films 360, pp. 96-102, 2000.
22. 2 thin films prepared by ion-assisted deposition," Thin Solid Films 359, pp. 171-176, 2000.
23. A. Bendavid, P.J. Martin, A. Jamting, and H. Takikawa, "Structural and optical properties of titanium oxide thin films deposited by filtered arc deposition," Thin Solid Films 355-356, pp. 6-11, 1999.
24. A. Bendavid, P.J. Martin, and H. Takikawa, "Deposition and modification of titanium dioxide thin films by filtered arc deposition," Thin Solid Films 360, pp. 241-249, 2000.
25. 2 thin films prepared on different substrates," Thin Solid Films 307, pp. 38-42, 1997.
26. R.M.A Azzam and N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
27. M. Born and E. Wolf, Principles of Optics, Pergamon Press, Oxford, 1968.
28. http://sopra-sa.com
29. D.E. Aspnes, "Approximate solution of ellipsometric equations for optically biaxial crystals," J. Opt. Soc. Am. 70, pp. 1275-1277, 1980.
30. n (M=Ca, Sr, Bi) single crystals with Bi-2212 phase on their surface," Acta Phys. Pol. A 100, pp. 553-563, 2001.