Fidelity of diamond replicas on silicon substrate

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 285-289

  Pizzo Passaro, A M ^a   Salvadori, M C ^a   Martins, D R ^a   Cattani, M ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; MICROMETERS; NANOSTRUCTURED MATERIALS; SILICON; SUBSTRATES; SURFACE ROUGHNESS;

WET-ETCHED PROCESS;

DIAMOND FILMS;

EID: 0343371541     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01332-8     Document Type: Article

References (15)

1. Cagin T., Che J.W., Gardos M.N., Fijany A., Goddard W.A. Nanotechnology. 10:(3):1999;278-284.
2. Davidson J.L., Kang W.P., Gurbuz Y, Holmes K.C., Davis L.G., Wisitsora-at A., Kerns D.V., Eidson R.L., Henderson T. Diamond Relat. Mater. 8:(8/9):1999;1741-1747.
3. Kohn E., Gluche P., Adamschik M. Diamond Relat. Mater. 8:(2/5):1999;934-940.
4. Ramesham R. Thin Solid Films. 340:(1/2):1999;1-6.
5. Ramesham R., Ellis C.D., Olivas J.D., Bolin S. Thin Solid Films. 330:(2):1999;62-66.
6. Bjorkman H., Rangsten P., Hollman P., Hjort K. Sensors Actuators A Phys. 73:(1/2):1999;24-29.
7. Ralchenko V.G., Baranov A.V., Vlasov I.I., Konov V.I. Phys. Stat. Solidi A Appl. Res. 174:(1):1999;171-1767.
8. Salvadori M.C., Cattani M., Mammana V., Monteiro O.R., Ager III J.W., Brown I.G. Thin Solid Films. 290/291:1996;157-160.
9. Mammana V.P., Mansano R., Verdonck P., Pavani Filho A., Salvadori M.C. Diamond Relat. Mater. 6:1997;1824-1829.
10. Mammana V.P., Salvadori M.C., Brown I.G. Thin Solid Films. 308/309:1997;258-262.
11. Salvadori M.C., Mammana V.P., Martins O.G., Degasperi F.T. Plasma Sources Sci. Technol. 4:1995;489-493.
12. Brewer M.A., Brown I.G., Dickinson M.R., Galvin J.E., MacGill R.A., Salvadori M.C. Rev. Sci. Instrum. 63:(6):1992;3389-3392.
13. Barabási A.-L., Stanley H.E. Fractal Concepts in Surface Growth. 1995;Cambridge University Press.
14. Salvadori M.C., Silveira M.G., Cattani M. Phys. Rev. E. 58:1998;6814-6816.
15. Salvadori M.C., Silveira M.G., Cattani M. Thin Solid Films. 354:1999;1-4.