Fabrication of free-standing diamond membranes

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 157-160

  Salvadori, M C ^a   Cattani, M ^a   Mammana, V ^a   Monteiro, O R ^b   Ager III, J W ^b   Brown, I G ^b  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Chemical vapour deposition; Diamond; Plasma processing and deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DISSOLUTION; ELECTRON DIFFRACTION; MICROWAVES; PLASMA APPLICATIONS; POLYMERIC MEMBRANES; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

FREE STANDING DIAMOND MEMBRANES; ISOTROPIC DISSOLUTION; MICROWAVE PLASMA ENHANCED VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 13544272970     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09010-4     Document Type: Article

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