Diamond membranes with controlled porosity

Diamond and Related Materials

Volumn 6, Issue 12, 1997, Pages 1824-1829

  Mammana, V P ^a   Mansano, R D ^a   Verdonck, P ^a   Pavani Filho, A ^b   Salvadori, M C ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b Microelectronics Institute   (Brazil)

Author keywords

Diamond; Membranes; Silicon surface

Indexed keywords

EID: 0001387364     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00145-3     Document Type: Article

References (9)

1. L. Schäfer, A. Bluhm, C.-P. Klages, B. Lvchel, L.-M. Buchmann, H.-L. Huber, Diamond Relat. Mater. 2 (1993) 1191-1196.
2. M.C. Salyadori, Y. Miyao, G. Moscati, Diamond Relat. Mater. 4 (1995) 1069-1072.
3. H. Windischmann, G.F. Epps, J. Appl. Phys. 68 (11) (1990) 5665-5673.
4. S. Iijima, Y. Aikawa, K. Baba, Appl. Phys. Lett. 57 (25) (1990) 2646-2648.
5. S. Iijima, Y. Aikawa, K. Baba, J. Mater. Res. 6 (7) (1991) 1491-1497.
6. A. Flöter, G. Schaarschmidt, B. Mainz, S. Laufer, S. Deutschmann, H.-J. Hinneberg, Diamond Relat. Mater. 4 (17) (1995) 930-935.
7. M.C. Salvadori, V.P. Mammana, O.G. Martins, F.T. Degasperi, Plasma Sources Sci. Technol. 4 (1995) 489-494.
8. M.C. Salvadori, M. Cattani, V.P. Mammana, O.R. Monteiro, J.W. Ager III, I.G. Brown, Thin Solid Films 290-291 (1996) 157-160.
9. M. Kawarada, K. Kurihara, K. Sasaki, Diamond Relat. Mater. 2 (1993) 1083-1089.