EPR Studies of Interface Defects in n-Type 6H-SiC/SiO2 Using Porous SiC

Materials Science Forum

Volumn 433-436, Issue , 2003, Pages 495-498

  Von Bardeleben, H J ^a   Cantin, J L ^a   Mynbaeva, M ^b   Saddow, S E ^c  

^a SORBONNE UNIVERSITÉ   (France)

^b IOFFE INSTITUTE   (Russian Federation)

^c ENB118   (United States)

Author keywords

SiC; SiC SiO2 Interface Defects

Indexed keywords

CARBON; DEFECTS; ELECTRON SPIN RESONANCE SPECTROSCOPY; INTERFACES (MATERIALS); OXIDATION; PARAMAGNETISM; POROUS MATERIALS; SILICA; STOICHIOMETRY;

PARAMAGNETIC DEFECTS;

SILICON CARBIDE;

EID: 0242665332     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (19)

1. C. Raynaud, J.of Non Crystalline Solids 280 (2001), p. 1.
2. E.G. Stein von Kamienski, F. Portheine, J. Stein et al., J. Appl. Phys. 79 (1996), p. 2529.
3. N.S. Saks, S.S. Mani, A.K. Agarwal, Appl.Phys.Lett 76 (2000) p. 2250.
4. K. Fukuda, W.J. Cho, K. Arai et al., Appl.Phys.Lett 77 (2000) p. 866.
5. P.J. Mac Farlane, M.E. Zvanut, J. Appl. Phys. 88 (2000) p. 4122.
6. H. Yano, T. Kimoto, H. Matsunami, Mater. Sci. Forum Vol. 353-356 (2001) p. 627.
7. K. Fukuda, S. Suzuki, T. Tanaka, K. Arai, App. Phys. Lett. 76 (2000) p. 1585.
8. S.E. Saddow, M. Mynbaeva, W.J. Choyke et al., Mater. Sci. Forum 353 (2001) p. 155.
9. M. Mynbaeva et al., App. Phys. Lett. 78 (2001) p. 117.
10. J.S. Shor, L. Bennis, A.D. Kurtz et al., J.Appl. Phys. 76 (1994) p. 4045.
11. S.E. Saddow, G. Melnychuk, M. Mynbaeva et al. MRS Symp. Proc. Vol. 640 (2001) p. H2.7.1.
12. M. Mynbaeva, N. Savkina, A. Zubrilov et al, MRS Symp. Proc. Vol. 587 (2000) p. O8.6.1.
13. J.L. Cantin, M. Schoisswohl, H.J. von Bardeleben, in Structural and Optical Properties of Porous Silicon Nanostructures (Gordon & Breach, 1997) Vol. 5, p. 409.
14. N. Ishii, M. Kumeda, T. Simizu, Japan. J. Appl. Phys. 20 (1981) L673 and L920.
15. E.H.Poindexter, G.H.Gerardi, M.E.Rueckel, P.J.Caplan et al., J. Appl. Phys. 56 (1984) p. 2844.
16. A. Stesman, Phys. Rev. B 48 (1993) p. 2418.
17. J.L. Cantin, M. Schoisswohl, H. J. von Bardeleben et al., Phys. Rev. B 52 (1995) R11599.
18. S.Lebib, M.Schoisswohl, J.L.Cantin, H.J.von Bardeleben, Thin Solid Films 294 (1997) p. 242.
19. C. Radtke et al., Nucl. Inst. Meth. in Phys. Res. B 190 (2002) p. 579.