Foundry technology for 130nm and beyond SoC

Proceedings of the Custom Integrated Circuits Conference

Volumn , Issue , 2003, Pages 343-350

  Tang, Denny D ^a   Diaz, C H ^a   Chao, C P ^a   Hsu, Hunming ^a   Lee, C Y ^a   Chang, C S ^a   Chia, Y T ^a   Yang, M T ^a   Sun, Jack Y C ^a  

^a TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DIGITAL CIRCUITS; ELECTRIC FIELDS; ELECTRIC POWER SUPPLIES TO APPARATUS; LEAKAGE CURRENTS; LITHOGRAPHY; MOSFET DEVICES; SUBSTRATES;

FOUNDRY TECHNOLOGY; MIXED-SIGNAL CHIP DESIGN; SYSTEM-ON-CHIP;

INTEGRATED CIRCUIT LAYOUT;

EID: 0242527272     PISSN: 08865930     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

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