A porous Si based novel isolation technology for mixed-signal integrated circuits

IEEE Symposium on VLSI Circuits, Digest of Technical Papers

Volumn , Issue , 2002, Pages 160-161

  Kim, Han Su ^a   Chong, Kyuchul ^a   Xie, Ya Hong ^a   Devincentis, Marc ^a   Itoh, Tatsuo ^a   Becker, Andrew J ^a   Jenkins, Keith A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSTALK; EDDY CURRENTS; NATURAL FREQUENCIES; POROUS SILICON; SILICON NITRIDE; SILICON WAFERS;

MIXED-SIGNAL INTEGRATED CIRCUITS; NETWORK ANALYZERS; ON-CHIP SPIRAL INDUCTORS;

VLSI CIRCUITS;

EID: 0036049043     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)