Spin-coated indium oxide thin film on alumina and silicon substrates and their gas sensing properties

Sensors and Actuators, B: Chemical

Volumn 65, Issue 1, 2000, Pages 312-315

  Chung, Wan Young ^a   Sakai, Go ^b   Shimanoe, Kengo ^b   Miura, Norio ^b   Lee, Duk Dong ^c   Yamazoe, Noboru ^b  

^a Semyung University   (South Korea)

^b KYUSHU UNIVERSITY   (Japan)

^c Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACETIC ACID; ALUMINA; AMMONIUM COMPOUNDS; CELLULOSE DERIVATIVES; COATING TECHNIQUES; DISSOLUTION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM COMPOUNDS; SILICON WAFERS; SURFACE ROUGHNESS; THIN FILM DEVICES;

INDIUM OXIDE; SPIN COATING;

CHEMICAL SENSORS;

EID: 0034733270     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00419-0     Document Type: Article

References (4)

1. 3 thin film gas sensor. Seiyama T. Chemical Sensor Technology. Vol. 2:1989;59-70 Kodansa, Tokyo. Elsevier, Amsterdam.
2. Egashira M., Shimizu Y. Order sensing by semiconductor metal oxides. Proc. 4th Int. Meeting on Chem. Sensors, Japan, Tokyo. 1992;510-513.
3. Yamaura H., Tamaki J., Moriga K., Miura N., Yamazoe N. Highly selective CO sensor using indium oxide doubly promoted by cobalt oxide and gold. J. Electrochem. Soc. 144:1997;158-160.
4. Chung W.-Y., Sakai G., Shimanoe K., Miura N., Lee D.-D., Yamazoe N. Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties. Sensors and Actuators B. 46:1998;139-145.