Effect of metal underlayers on low temperature silicon growth

Journal of Applied Physics

Volumn 94, Issue 8, 2003, Pages 5374-5378

  Xu, K ^a   Pradhan, A ^a   Shah, S Ismat ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; DIFFUSION; GLASS; GOLD; GRAIN SIZE AND SHAPE; POLYCRYSTALLINE MATERIALS; RAMAN SCATTERING; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ADATOM DIFFUSION;

SILICON;

EID: 0242304095     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1611633     Document Type: Article

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