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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1078-1082

Low temperature deposition and characterization of polycrystalline Si films on polymer substrates

(3) Xu, K a Shah, S I a Guerin, D a

a UNIVERSITY OF DELAWARE (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS MATERIALS; CONDENSATION; FILM GROWTH; GRAIN SIZE AND SHAPE; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

POLYCRYSTALLINE FILMS;

SEMICONDUCTING FILMS;

EID: 0035393840 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1345905 Document Type: Article

Times cited : (8)

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