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Volumn 83, Issue 9, 2003, Pages 1764-1766
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Charge storage in undoped hydrogenated amorphous silicon by ambient atomic force microscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
ANODIC OXIDATION;
ATOMIC FORCE MICROSCOPY;
CHARGED PARTICLES;
FERMI LEVEL;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
THIN FILMS;
CHARGE STORAGE;
SILANES;
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EID: 0141831149
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1606872 Document Type: Article |
Times cited : (31)
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References (19)
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