Influence of combined AFM/current measurement on local electronic properties of silicon thin films

Journal of Non-Crystalline Solids

Volumn 299-302, Issue PART 1, 2002, Pages 360-364

  Rezek, B ^a   Mates, T ^a   Sipek E ^a   Stuchlik J ^a   Fejfar, A ^a   Kocka J ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; ELECTRIC CURRENT MEASUREMENT; ELECTRIC POTENTIAL; ELECTRONIC PROPERTIES; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON;

SILICON THIN FILMS;

THIN FILMS;

EID: 0036540221     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01012-2     Document Type: Conference Paper

References (12)