Nano-oxidation of an amorphous silicon surface with an atomic force microscope

Journal of Non-Crystalline Solids

Volumn 299-302, Issue PART 2, 2002, Pages 1090-1094

  Umezu, I ^a   Yoshida, T ^a   Matsumoto, K ^a   Inada, M ^a   Sugimura, A ^a  

^a KONAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; CRYSTAL DEFECTS; CRYSTAL LATTICES; CRYSTALLINE MATERIALS; ELECTRIC POTENTIAL; HYDROGENATION; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; SURFACE TREATMENT;

NANO-OXIDATION;

AMORPHOUS SILICON;

EID: 18244425504     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01076-6     Document Type: Article

References (8)