Instabilities and multiple steady states of radio-frequency discharges in [Formula Presented]

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 54, Issue 1, 1996, Pages 782-790

  Metsi, Efimia ^a,b   Gogolides, Evangelos ^a,b   Boudouvis, Andreas ^a,b  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003757768     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.54.782     Document Type: Article

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