Scatterometry for the measurement of metal features

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 135-146

  Raymond, Christopher J ^a   Fatter, Steve W ^a   Sucher, Scott ^a  

^a Bio Rad CD Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; METALS; PROCESS CONTROL;

CRITICAL DIMENSION (CD); SCATTEROMETRY;

LITHOGRAPHY;

EID: 0033703132     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)