Optical scatterometry with neural network model for nondestructive measurement of submicron features

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3743, Issue , 1999, Pages 33-40

  Kallioniemi, Ilkka ^a   Saarinen, Jyrki ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; HIERARCHICAL SYSTEMS; LIGHT SCATTERING; MICROELECTRONICS; NEURAL NETWORKS; OPTICAL PROPERTIES; OPTICS;

NONDESTRUCTIVE MEASUREMENT; OPTICAL SCATTEROMETRY; SUBMICRON FEATURES;

OPTICAL VARIABLES MEASUREMENT;

EID: 0032651789     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (21)