Thermodynamics and kinetics of room-temperature microstructural evolution in copper films

Journal of Applied Physics

Volumn 94, Issue 5, 2003, Pages 2874-2881

  Detavernier, C ^a,b   Rossnagel, S ^a   Noyan, C ^a   Guha, S ^a   Cabral Jr , C ^a   Lavoie, C ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; GRAIN BOUNDARIES; MICROSTRUCTURE; REACTION KINETICS; THERMODYNAMICS;

DEFECT DENSITY;

METALLIC FILMS;

EID: 0141633952     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1596366     Document Type: Article

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