Room-temperature grain growth in sputter-deposited Cu films

Applied Physics Letters

Volumn 82, Issue 12, 2003, Pages 1863-1865

  Detavernier, C ^a   Deduytsche, D ^a   Van Meirhaeghe, R L ^a   De Baerdemaeker, J ^a   Dauwe, C ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COPPER; CRYSTAL MICROSTRUCTURE; FILM GROWTH; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; X RAY DIFFRACTION ANALYSIS;

SELF-ANNEALING;

GRAIN GROWTH;

EID: 0037464192     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1563048     Document Type: Article

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