Thin-film deposition of polymers by vacuum degradation

Chemical Reviews

Volumn 103, Issue 9, 2003, Pages 3607-3649

  Gritsenko, Konstantin P ^a   Krasovsky, Anatoly M ^b  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

^b VA Belyi Metal Polymer Research Institute of National Academy of Sciences of Belarus   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; DEGRADATION; DEPOSITION; FILM GROWTH; FRICTION; HEATING; LUMINESCENCE OF ORGANIC SOLIDS; MASS SPECTROMETRY; ORGANIC POLYMERS; STRENGTH OF MATERIALS; SURFACE PROPERTIES; VACUUM APPLICATIONS;

ANTIFRICTION LAYER; CORROSION PROTECTIVE LAYER; DIELECTRIC LAYER; ELECTRO-PHYSICAL PROPERTIES; ELECTRON BEAM DESTRUCTION; ION BEAM DESTRUCTION; LASER-INDUCED DESTRUCTION; LUMINESCENT PROPERTIES; POLYMER FILM; VACUUM DEGRADATION;

THIN FILMS;

EID: 0141454841     PISSN: 00092665     EISSN: None     Source Type: Journal    
DOI: 10.1021/cr010449q     Document Type: Article

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