Defect theory: Elusive state-of-the-art

Materials Today

Volumn 6, Issue 6, 2003, Pages 26-35

  Estreicher, Stefan K ^a  

^a TEXAS TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; CRYSTAL GROWTH; ELECTRIC POTENTIAL; INTEGRATED CIRCUITS; ION IMPLANTATION; MOSFET DEVICES; POLYSILICON; RAPID THERMAL ANNEALING;

PROTON IMPLANTATION;

CRYSTAL DEFECTS;

EID: 0042994152     PISSN: 13697021     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-7021(03)00631-X     Document Type: Article

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