Transmission electron microscopy investigation of Pt/Ba0.7Sr0.3TiO3/Pt capacitors with different annealing processes

Journal of the American Ceramic Society

Volumn 86, Issue 7, 2003, Pages 1190-1195

  Qin, Yue Ling ^a,c   Jia, Chun Lin ^a   Liedtke, Ralf ^b   Waser, Rainer ^a,b   Urban, Knut ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

^c UNIVERSITY OF GRONINGEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITORS; COMPOSITION; ELECTRODES; FILM GROWTH; INTERFACES (MATERIALS); LEAKAGE CURRENTS; MICROSTRUCTURE; OXYGEN; PLATINUM; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY;

FORMING GAS ATMOSPHERE (FGA);

BARIUM COMPOUNDS;

EID: 0042808460     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2003.tb03446.x     Document Type: Article

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