Structure and luminescence of GaN films by sputtering post-annealing-reaction technique

Diamond and Related Materials

Volumn 12, Issue 8, 2003, Pages 1402-1405

  Ma, Hong Lei ^a   Yang, Ying Ge ^a   Xue, Cheng Shan ^b   Zhuang, Hui Zhao ^b   Hao, Xiao Tao ^a   Ma, Jin ^a  

^a SHANDONG UNIVERSITY   (China)

^b SHANDONG NORMAL UNIVERSITY   (China)

Author keywords

GaN films; Photoluminescence; Quartz substrates; Sputtering post annealing reaction technique

Indexed keywords

ANNEALING; FILM GROWTH; GALLIUM NITRIDE; LUMINESCENCE; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

POST-ANNEALING-REACTION TECHNIQUE;

THIN FILMS;

DIAMOND;

EID: 0042623797     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00167-5     Document Type: Article

References (19)

1. Nakamura S. Tietian J. Appl. Phys. Lett. 74 1994 1687
2. Yang Q.K. Li A.Z. Zhang Y.G. Yang B. Brandt O. Ploog K. J. Cryst. Growth 192 1998 28
3. Brandt O. Wuensche H.J. Yang H. Klann R. Muellhaeuser J.R. Ploog K.H. J. Cryst. Growth 189-190 1998 790
4. Nakamura S. Senoh M. Nagahama S. Iwasa N. Yamada T. Matsushita T. Kiyoku H. Sugimoto Y. Jpn. J. Appl. Phys. 35 1B 1996 L74
5. Nakamura S. Senoh M. Iwasa N. Nagahama S. Jpn. J. Appl. Phys. 34 1995 L797
6. Nisha Preschilla A. Major S. Kumar N. Samajdar I. Srinivasa R.S. Appl. Phys. Lett. 77 2000 1861
7. Kobayashi S. Nonomura S. Ohmori T.et al. Appl. Surf. Sci. 113/114 1997 480
8. Young W.T. Silva S.R.P. Anguita J.V.et al. Diamond Relat. Mater. 9 2000 456
9. Preschilla N.A. Elkashef N.M. Srinivasa R.S. Major S. Surf. Coat. Technol. 108-109 1998 328
10. Horng R.H. Wuu D.S. Wei S.C. Chan S.H. Kung C.Y. Thin Solid Films 343-344 1999 642
11. Ishikaua H. Kobayashi S. Koide Y. Yamasaki S. J. Appl. Phys. 81 1997 1315
12. Briggs D. Seah M.P. Practical Surface Analysis 1979 Wiley New York
13. Dinescu M. Verardi P. Boulmer-Leborgne C. Gerardi C. Mirenghi L. Sandu V. Appl. Surf. Sci. 127-129 1998 559
14. Elkashef N. Srinivasa R.S. Major S. Sabharwal S.C. Muthe K.P. Thin Solid Films 333 1998 9
15. Kong M.-Y. Zhang J.-P. Wang X.-L. Sun D.-Z. J. Cryst. Growth 227-228 2001 371
16. Paek J.-S. Kim K.-K. Lee J.-.et al. J. Cryst. Growth 200 1999 55
17. Amanullah F.M. Pratap K.J. Hari Babu V. Mater. Sci. Eng. B 52 1998 93
18. Ghuang T.J. Brundle C.R. Rice D.W. Surf. Sci. 59 1979 413
19. Binet L. Gourier D. J. Phys. Chem. Solids 59 1998 1241